Development of a high-power vertical-cavity surface-emitting laser array  with ion-implanted current apertures

Hideyuki Naito; Masahiro Miyamoto; Yuta Aoki; Akira Higuchi; Kousuke Torii; Takehito Nagakura; Takenori Morita; Junya Maeda; Hirofumi Miyajima; Harumasa Yoshida

doi:10.1117/12.2001589

13 March 2013 Development of a high-power vertical-cavity surface-emitting laser array with ion-implanted current apertures

Hideyuki Naito, Masahiro Miyamoto, Yuta Aoki, Akira Higuchi, Kousuke Torii, Takehito Nagakura, Takenori Morita, Junya Maeda, Hirofumi Miyajima, Harumasa Yoshida

Author Affiliations +

Proceedings Volume 8639, Vertical-Cavity Surface-Emitting Lasers XVII; 86390N (2013) https://doi.org/10.1117/12.2001589
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

Vertical-Cavity Surface-Emitting Lasers (VCSELs) are very attractive to high power light sources owing to the advantageous configuration of two-dimensional arrays and being free from catastrophic optical damage. Although oxideconfined VCSELs have been employed in most of applications with VCSELs, ion-implanted VCSELs have a potential to be the better light sources for high power applications. In spite of the fact, the detailed characteristics of the ionimplanted VCSELs had been researched only in ten milliwatt-class output power. Here we report on a high power VCSEL-array with proton-implanted current apertures. A peak output power of over 40 W under short-pulse operation has been achieved. This is the first demonstration of ten watt-class output power for ion-implanted VCSELs.

Citation Download Citation

Hideyuki Naito, Masahiro Miyamoto, Yuta Aoki, Akira Higuchi, Kousuke Torii, Takehito Nagakura, Takenori Morita, Junya Maeda, Hirofumi Miyajima, and Harumasa Yoshida "Development of a high-power vertical-cavity surface-emitting laser array with ion-implanted current apertures", Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 86390N (13 March 2013); https://doi.org/10.1117/12.2001589

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