Micro-optical system as integration platform for III-N nanowire based opto-chemical detectors

R. Kleindienst; V. Cimalla; M. Eickhoff; A. Grewe; K. Holc; J. Schätzle; U. Schwarz; J. Teubert; S. Sinzinger

doi:10.1117/12.2002411

5 March 2013 Micro-optical system as integration platform for III-N nanowire based opto-chemical detectors

R. Kleindienst, V. Cimalla, M. Eickhoff, A. Grewe, K. Holc, J. Schätzle, U. Schwarz, J. Teubert, S. Sinzinger

Proceedings Volume 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI; 861315 (2013) https://doi.org/10.1117/12.2002411
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

The highly sensitive photoluminescence (PL) response of group III-Nitrides (III-N) nanowire heterostructures (NWHs) to hydrogen (H₂) and oxygen (O₂) allows for the realization of reliable gas detectors. For industrial real time gas monitoring applications, e.g. in the field of aerospace, a large scale laboratory setup was miniaturized by integrating electro-optical components and the NWHs within a robust micro optical system. As a result of the all optical addressing and read out the detection periphery can be completely isolated from the investigated environment which significantly increases the detection sensitivity. The optical design and fabrication techniques as well as an experimental investigation of the system performance are the main topics discussed in this paper.

Citation Download Citation

R. Kleindienst, V. Cimalla, M. Eickhoff, A. Grewe, K. Holc, J. Schätzle, U. Schwarz, J. Teubert, and S. Sinzinger "Micro-optical system as integration platform for III-N nanowire based opto-chemical detectors", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 861315 (5 March 2013); https://doi.org/10.1117/12.2002411

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available