Femtosecond fiber laser-based micro- and nano-processing

Huan Huang; Lih-Mei Yang; Jian Liu

doi:10.1117/12.930533

15 October 2012 Femtosecond fiber laser based micro- and nano-processing

Huan Huang, Lih-Mei Yang, Jian Liu

Proceedings Volume 8519, Nanophotonics and Macrophotonics for Space Environments VI; 85190M (2012) https://doi.org/10.1117/12.930533
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

Micro- and nano-processing are performed by using a high energy mode-locked femtosecond (fs) fiber laser. The laser beam has 1030 nm center wavelength, 750 fs pulse duration and up to 10 μJ pulse energy. Firstly, direct writing of optical waveguide inside glass materials is presented and a 3-D curved waveguide is demonstrated. Secondly, by taking advantages of fs laser deterministic damage threshold, micrometer and sub-micrometer features are obtained for surface ablation. Thirdly, fs UV (FHG, 258 nm) laser processing is investigated and nanometer features are obtained. Periodic structures in good order are also found and the patterns extend coherently over many overlapping laser pulses and scanning tracks. It has 100 nm period, 50 nm width and 50 nm depth. Such micro and nano processing method suggests a possible technique to produce nanogratings, microelectronics, or nanopatterned surfaces of micro-sensors for space optoelectronics.

Citation Download Citation

Huan Huang, Lih-Mei Yang, and Jian Liu "Femtosecond fiber laser based micro- and nano-processing", Proc. SPIE 8519, Nanophotonics and Macrophotonics for Space Environments VI, 85190M (15 October 2012); https://doi.org/10.1117/12.930533

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