Study on Control Strategy for Coarse/Fine Dual-stage of Step and Scan Lithography

Qi Liu; Ping Ma; Song Hu; Lanlan Li; Jiangping Zhu; Zhuang Sheng

doi:10.1117/12.971471

15 October 2012 Study on control strategy for coarse/fine dual-stage of step and scan lithography

Qi Liu, Ping Ma, Song Hu, Lanlan Li, Jiangping Zhu, Zhuang Sheng

Proceedings Volume 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems; 84180X (2012) https://doi.org/10.1117/12.971471
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Lithography is one of the most important and complicated key equipments for the Integrated Circuit (IC) manufacture. The ultra-precision stage is the important subsystem of lithography and its motion performance impacts directly on the resolution and throughput of lithography. In this paper, a robust and high response speed control strategy for dual-stage manipulator is presented. The coarse/fine dual-stage uses the linear motor driven coarse (macro) positioning stage and the Lorenz plane motor driven fine (micro) positioning stage. By adopting merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. The feedback controller is constructed so that the fine stage tracks the coarse stage errors. The controller is robustly designed as the master-slave control strategy. In addition, the position decoupling which translates fine stage’s machine position command into its actual position command are discussed and, as a result, the overall coarse/fine dual-stage servo system exhibits robust and high response speed performance. Simulation shows that master-slave controller can much decrease positioning error and improve response speed of the coarse/fine dual-stage system.

Citation Download Citation

Qi Liu, Ping Ma, Song Hu, Lanlan Li, Jiangping Zhu, and Zhuang Sheng "Study on control strategy for coarse/fine dual-stage of step and scan lithography", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180X (15 October 2012); https://doi.org/10.1117/12.971471

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KEYWORDS

Lithography

Control systems

Actuators

Mathematical modeling

Optics manufacturing

Feedback control

Servomechanisms

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