Supersmooth polishing with sub-angstron roughness

Junlin Wang

doi:10.1117/12.975832

16 October 2012 Supersmooth polishing with sub-angstron roughness

Junlin Wang

Author Affiliations +

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 841609 (2012) https://doi.org/10.1117/12.975832
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Numerical-controlled (NC) micro-jet supersmooth polishing technology is a new non-contacting polishing method developed on the base of the float-polishing. In this paper, both the theory and the techniques about this new polishing technology are introduced in detail, and the surface of fused silica was polished, white-light interferometer (WLI) and atomic force microscope (AFM) were used to measure the evolutions of waveness and roughness during the fabricating process. No new scratches were produced when the nanoparticles removed the atoms away from the surface. The roughness decreased monotonously with the removal of subsurface damage layer. And ideal supersmooth surface without scratches was achieved with waveness less than 0.2nmrmsRMS while the high-spatial frequency roughness less than 0.1nmrmsRMS (sub-angstron).

Citation Download Citation

Junlin Wang "Supersmooth polishing with sub-angstron roughness", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 841609 (16 October 2012); https://doi.org/10.1117/12.975832

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