Research of THz wave detector based on bi-material microcantilever arrays

Bo Su; Guoteng Duan; Cunlin Zhang

doi:10.1117/12.919016

13 March 2012 Research of THz wave detector based on bi-material microcantilever arrays

Bo Su, Guoteng Duan, Cunlin Zhang

Proceedings Volume 8330, Photonics and Optoelectronics Meetings (POEM) 2011: Laser and Terahertz Science and Technology; 833012 (2012) https://doi.org/10.1117/12.919016
Event: Photonics and Optoelectronics Meetings 2011, 2011, Wuhan, China

Abstract

The paper describes a new THz wave detector. The bi-material of niobium nitride and aluminum, which has a large difference in thermal expansion coefficient, is used to fabricate the micro-cantilever arrays of substrate-free using MEMS technology. The niobium nitride is used to absorb THz, and aluminum is used as the deformation material. The method of software simulation is used to research the optimum thickness ratio of the bi-material for the best design of the micro-cantilever. In addition, in order to prevent the heat diffusion, the micro-cantilever arrays is placed in a vacuum chamber which has the function of vibration prevention using the mechanical pump and molecular pump to keep the high vacuum degree for improving the signal to noise ratio of the detection system. The reflection type visible light optical readout system is used to acquire the THz wave information indirectly. Furthermore, the method of difference processing is used to process image for improving systemic resolution. At last, a THz source with a power of 5mW and a frequency of 973GHz is used for detection experiment, and the data processing results show that the micro-cantilever has deformed.

Citation Download Citation

Bo Su, Guoteng Duan, and Cunlin Zhang "Research of THz wave detector based on bi-material microcantilever arrays", Proc. SPIE 8330, Photonics and Optoelectronics Meetings (POEM) 2011: Laser and Terahertz Science and Technology, 833012 (13 March 2012); https://doi.org/10.1117/12.919016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available