Liftoff lithography of metals for extreme ultraviolet lithography mask absorber layer patterning

Adam Lyons; Ranganath Teki; John Hartley

doi:10.1117/12.916628

23 March 2012 Liftoff lithography of metals for extreme ultraviolet lithography mask absorber layer patterning

Adam Lyons, Ranganath Teki, John Hartley

Proceedings Volume 8322, Extreme Ultraviolet (EUV) Lithography III; 83221X (2012) https://doi.org/10.1117/12.916628
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

The authors present a process for patterning Extreme Ultraviolet Lithography (EUVL) mask absorber metal using electron beam evaporation and bi-layer liftoff lithography. The Line Edge Roughness (LER) and Critical Dimension Uniformity (CDU) of patterned chrome absorber are determined for various chrome thicknesses on silicon substrates, and the viability of the method for use with nickel absorber and on EUVL masks is demonstrated. Scanning Electron Microscope (SEM) data is used with SuMMIT software to determine the absorber LER and CDU. The Lawrence Berkeley National Labs Actinic Inspection Tool (AIT) is used to verify the printability of the pattern down to 24nm half pitch. The effect of processing on the integrity of the mask multilayer is measured using an actinic reflectometer at the College of Nanoscale Science and Engineering.

Citation Download Citation

Adam Lyons, Ranganath Teki, and John Hartley "Liftoff lithography of metals for extreme ultraviolet lithography mask absorber layer patterning", Proc. SPIE 8322, Extreme Ultraviolet (EUV) Lithography III, 83221X (23 March 2012); https://doi.org/10.1117/12.916628

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available