Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers

Thilo Sandner; Thomas Grasshoff; Harald Schenk; Andreas Kenda

doi:10.1117/12.909817

18 February 2012 Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers

Thilo Sandner, Thomas Grasshoff, Harald Schenk, Andreas Kenda

Author Affiliations +

Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520C (2012) https://doi.org/10.1117/12.909817
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

A translatory MOEMS actuator with extraordinary large stroke - especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers (FTS) - is presented. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of an optimized MEMS design using four pantograph suspensions of the comparative large mirror plate with 5mm diameter. The MOEMS device is driven electro - statically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 600 μm amplitude (typically 1mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency. For FTS system integration the MOEMS actuator has been encapsulated in a hybrid optical vacuum package. In this paper we discuss the thermal influences of packaging technology on MOEMS behaviors more detail.

Citation Download Citation

Thilo Sandner, Thomas Grasshoff, Harald Schenk, and Andreas Kenda "Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520C (18 February 2012); https://doi.org/10.1117/12.909817

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