Laser-chemical precision machining of micro forming tools at low laser powers

Salar Mehrafsun; Peiran Zhang; Frank Vollertsen; Gert Goch

doi:10.1117/12.906376

20 February 2012 Laser-chemical precision machining of micro forming tools at low laser powers

Salar Mehrafsun, Peiran Zhang, Frank Vollertsen, Gert Goch

Proceedings Volume 8244, Laser-based Micro- and Nanopackaging and Assembly VI; 82440K (2012) https://doi.org/10.1117/12.906376
Event: SPIE LASE, 2012, San Francisco, California, United States

Abstract

Micro forming tools require high surface quality as well as contour accuracy, i.e. close tolerances at small dimensions. However, their structuring with necessary accuracy is limited to a small number of applicable technologies due to the mechanical properties of the tool material on micro scale. This contribution reports on an approach for machining techniques for precise tool finishing, developed at Bremer Institut für angewandte Strahltechnik GmbH (BIAS) called Laser-Jet-Process (LJP). This approach is based on a laser-chemical etching method where a focused laser beam is guided coaxially to an etchant jet-stream onto the material surface. The material removal is a result of laser-induced chemical reactions between etchant and surface at low laser powers. The evaluation of data shows a strong correlation of material removal and several process variables. In particular, high laser powers combined with high feed rates of the work piece and low flow rates of the etchant result in a break-off in material removal. In order to overcome this issue, the process boundaries have been experimentally determined and implemented in a quality control system. The quality control system consists of an automated path planning model and an inverse process model. The automated path planning model computes position and Gaussian intensity profile for a sequence of overlapping laser removal paths to achieve the desired tool shape. The inverse process model renders specific process variables for every single removal path from a pre-assembled data pool within experimentally defined boundary conditions.

Citation Download Citation

Salar Mehrafsun, Peiran Zhang, Frank Vollertsen, and Gert Goch "Laser-chemical precision machining of micro forming tools at low laser powers", Proc. SPIE 8244, Laser-based Micro- and Nanopackaging and Assembly VI, 82440K (20 February 2012); https://doi.org/10.1117/12.906376

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available