Laser plasma effects on surface damage characteristics of silicon

Jinghua Han; Weixing Fan; Yaguo Li; Liming Yang; Guoying Feng; Xiang Gao; Yanyan Liu; Lingdong Bao; Yongzhong Huang

doi:10.1117/12.910071

12 January 2012 Laser plasma effects on surface damage characteristics of silicon

Jinghua Han, Weixing Fan, Yaguo Li, Liming Yang, Guoying Feng, Xiang Gao, Yanyan Liu, Lingdong Bao, Yongzhong Huang

Proceedings Volume 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers; 820616 (2012) https://doi.org/10.1117/12.910071
Event: Pacific Rim Laser Damage Symposium: Optical Materials for High Power Lasers, 2011, Shanghai, China

Abstract

Silicon is a key material to electro-photonic detectors, which makes the studies of laser induced damage of silicon significantly important in laser detecting and military applications. The damage characters of silicon under high-intensity nanosecond laser pulses have been investigated in this paper. The results show that the synergy of thermal, shock and spectral radiation effects of laser plasma determines the damage characters in silicon. Due to thermal and shock effects of laser plasma, the material is melt, vaporized, ionized and pushed out in laser irradiated area. This way, pits are formed and the cool ejected effluents are distributed radially. The interference between scattered and incident laser can form a periodic structure because of the periodic distribution of thermal stress in particular area. N, O and Si characteristic spectrum in laser plasma suggests that colored film is the mixture of SiO_x:SiN_y from laser plasma under repetitive laser pulses.

Citation Download Citation

Jinghua Han, Weixing Fan, Yaguo Li, Liming Yang, Guoying Feng, Xiang Gao, Yanyan Liu, Lingdong Bao, and Yongzhong Huang "Laser plasma effects on surface damage characteristics of silicon", Proc. SPIE 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, 820616 (12 January 2012); https://doi.org/10.1117/12.910071

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available