eMET POC: realization of a proof-of-concept 50 keV electron multibeam mask exposure tool

Elmar Platzgummer; Christof Klein; Hans Loeschner

doi:10.1117/12.895523

13 October 2011 eMET POC: realization of a proof-of-concept 50 keV electron multibeam mask exposure tool

Elmar Platzgummer, Christof Klein, Hans Loeschner

Proceedings Volume 8166, Photomask Technology 2011; 816622 (2011) https://doi.org/10.1117/12.895523
Event: SPIE Photomask Technology, 2011, Monterey, California, United States

Abstract

Based on a massively parallel beam writing strategy (BACUS 2010) a mask writer proof-of-concept tool was realized in 2011. The eMET (electron Mask Exposure Tool) POC column is designed to provide ca. 262-thousand (512 x 512) programmable beams of 50 keV energy and 20 nm or 10 nm beam size. The total beam current through the column is up to 1 μA. The eMET POC is equipped with a laser-interferometer controlled stage for exposure of one cm² test pattern fields on 6" mask blanks. Operating the eMET POC with a stencil plate, first exposure results are presented. The further eMET POC project plan and the roadmap for eMET Alpha, Beta and multi-generational HVM tools are outlined.

Citation Download Citation

Elmar Platzgummer, Christof Klein, and Hans Loeschner "eMET POC: realization of a proof-of-concept 50 keV electron multibeam mask exposure tool", Proc. SPIE 8166, Photomask Technology 2011, 816622 (13 October 2011); https://doi.org/10.1117/12.895523

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available