High Resolution Triangulation Based Range Sensing For Metrology

Jeffrey A. Jalkio; John E. Bolkcom; Steven K. Case

doi:10.1117/12.941700

17 February 1987 High Resolution Triangulation Based Range Sensing For Metrology

Jeffrey A. Jalkio, John E. Bolkcom, Steven K. Case

Proceedings Volume 0814, Photomechanics and Speckle Metrology; (1987) https://doi.org/10.1117/12.941700
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Triangulation based range sensors have long been used for making large scale measurements, however, when triangulation techniques are used in metrology applications with very tight tolerances, new concerns appear. In particular, the design of very high resolution range sensors requires an understanding of surface microstructure effects that can severely limit the accuracy of a system. For triangulation based sensors to enter the regime where interferometry has traditionally been used, the problems of surface microstructure induced noise must be overcome. In this paper we discuss the factors that limit the resolution of triangulation based range sensors, and the theoretical limitations on the accuracy of such sensors.

Citation Download Citation

Jeffrey A. Jalkio, John E. Bolkcom, and Steven K. Case "High Resolution Triangulation Based Range Sensing For Metrology", Proc. SPIE 0814, Photomechanics and Speckle Metrology, (17 February 1987); https://doi.org/10.1117/12.941700

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