Fabrication of complex structures with an array of nanopinhole cameras

Hartmut S. Leipner; Nadine Geyer; Frank Syrowatka; Huang Cheng; Bodo Fuhrmann

doi:10.1117/12.893640

23 September 2011 Fabrication of complex structures with an array of nanopinhole cameras

Hartmut S. Leipner, Nadine Geyer, Frank Syrowatka, Huang Cheng, Bodo Fuhrmann

Author Affiliations +

Proceedings Volume 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII; 81020W (2011) https://doi.org/10.1117/12.893640
Event: SPIE NanoScience + Engineering, 2011, San Diego, California, United States

Abstract

A method which combines colloidal lithography with the principle of a pinhole camera is presented for the fabrication of well-ordered arrays of complex structures. By using atomic beams, it is possible to overcome the diffraction limit of light for apertures with nanometer dimensions. There are no geometrical or chromatic aberrations, since no refracting elements exist. Limitations due to the finite size of the nanopinholes, which lead to a certain blurring of the replica, are discussed.

Citation Download Citation

Hartmut S. Leipner, Nadine Geyer, Frank Syrowatka, Huang Cheng, and Bodo Fuhrmann "Fabrication of complex structures with an array of nanopinhole cameras", Proc. SPIE 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII, 81020W (23 September 2011); https://doi.org/10.1117/12.893640

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE