Speckle pattern simulations for in-plane displacement measurements

Yves Salvadé; Romain Bonjour

doi:10.1117/12.889789

23 May 2011 Speckle pattern simulations for in-plane displacement measurements

Yves Salvadé, Romain Bonjour

Proceedings Volume 8083, Modeling Aspects in Optical Metrology III; 80830H (2011) https://doi.org/10.1117/12.889789
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

In this paper, we describe a theoretical model, which allows simulating speckle pattern in an imaging system and its detection by an image sensor with a limited number of pixels. This simulation tool is based on the Fourier Optics theory. Preliminary tests show a very good agreement between simulations and experiments. We have demonstrated experimentally and theoretically that sub-micrometer displacement resolution is possible by means of the crosscorrelation of speckle patterns, over a range limited to half of the field-of-view of the imaging system.

Citation Download Citation

Yves Salvadé and Romain Bonjour "Speckle pattern simulations for in-plane displacement measurements", Proc. SPIE 8083, Modeling Aspects in Optical Metrology III, 80830H (23 May 2011); https://doi.org/10.1117/12.889789

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