Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas

Eberhard Manske; Gerd Jäger; Tino Hausotte; Torsten Machleidt

doi:10.1117/12.888445

26 May 2011 Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas

Eberhard Manske, Gerd Jäger, Tino Hausotte, Torsten Machleidt

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 808203 (2011) https://doi.org/10.1117/12.888445
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Due to the development and progress in micro- and nanotechnology the range of measuring tasks is becoming ever more varied and multifaceted. Decreasing structure widths in combination with large area measurements or complex 3D-micro- and nanostructures with high aspect ratios not only on flat but also on curved surfaces are some of these measurement challenges. In order to solve the problems arising within this application spectrum a multi-sensor platform based on a laser focus probe was developed. This platform is integrated in the Nanopositioning and Nanomeasuring Machine developed mainly at the Institute of Process Measurement and Sensor Technology at the Ilmenau University of Technology with a measuring range of 25 mm x 25 mm x 5 mm and subnanometre resolution.

Citation Download Citation

Eberhard Manske, Gerd Jäger, Tino Hausotte, and Torsten Machleidt "Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 808203 (26 May 2011); https://doi.org/10.1117/12.888445

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