In-Process Optical Metrology For Precision Machining

Rudiger Haberland

doi:10.1117/12.967114

1 January 1987 In-Process Optical Metrology For Precision Machining

Rudiger Haberland

Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967114
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

Straylight Measurement, Interferometric Measurement, Schlieren Microscopy, Optical Distance Sensing and Capacitive Distance Measurement are reviewed in their potential for in-process metrology. Today existing restraints are outlined and development necessities discussed.

Citation Download Citation

Rudiger Haberland "In-Process Optical Metrology For Precision Machining", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967114

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