Artifacts of the AFM image due to the probe controlling parameters

Hiroshi Itoh; Chunmei Wang; Hideki Takagi

doi:10.1117/12.879774

20 April 2011 Artifacts of the AFM image due to the probe controlling parameters

Hiroshi Itoh, Chunmei Wang, Hideki Takagi

Proceedings Volume 7971, Metrology, Inspection, and Process Control for Microlithography XXV; 79711A (2011) https://doi.org/10.1117/12.879774
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Image of the atomic force microscopy (AFM) is the convolution of probe shape and specimen geometry. However, probe shape for AFM imaging is not equivalent to the actual probe shape. Gap distance was controlled with the interaction between probe and specimen. Imaging parameters for controlling gap distance between probe and specimen surface is one of the origins of image artifacts. Artifacts of the AFM image were analyzed as a function of set-point in dynamic mode, using well defined reference specimen. Two kinds of typical objects, such as single protrusion and narrow gap were used for the analysis of artifacts in the AFM image.

Citation Download Citation

Hiroshi Itoh, Chunmei Wang, and Hideki Takagi "Artifacts of the AFM image due to the probe controlling parameters", Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79711A (20 April 2011); https://doi.org/10.1117/12.879774

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available