Paper
6 October 2010 Effect on surface roughness of zerodur material in atmospheric pressure plasma jet processing
H. L. Jin, B. Wang, F. H. Zhang
Author Affiliations +
Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 76552X (2010) https://doi.org/10.1117/12.866683
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China
Abstract
Zerodur material is considered as the ideal material in the high performance optic systems because of its excellent thermal stability characteristics. This paper deals with the impacting factors on the zerodur material surface roughness during atmospheric pressure plasma jet(APPJ) processing. At first, based on multiphase and multi-component in zerodur material, the effect on the zerodur surface chemical components and surface roughness is studied when the element contained Si is etched during the chemical machining process. The change of surface microcosmic topography is observed, it is proved that the technology of atmospheric pressure plasma jet can modify the surface roughness of zerodur material. Moreover, in consideration of the re-deposition phenomenon in the machining process, the composition of the re-deposition are studied and the genesis of the re-deposition were analysed. Scanning Electron Microscopy (SEM) with Energy Dispersive X-ray spectrometry (EDX) were utilized to obtain the elemental composition of the sample powder residuum on zerodur surface. The relationship between substrate roughness and the process parameters is established based on the experimental results. Experimental results indicate that it is beneficial to add certain amount O2 to modify the surface roughness of zerodur material. This finding provides an important basis for the improvement of surface roughness in APPJ of zerodur material.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. L. Jin, B. Wang, and F. H. Zhang "Effect on surface roughness of zerodur material in atmospheric pressure plasma jet processing", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76552X (6 October 2010); https://doi.org/10.1117/12.866683
Lens.org Logo
CITATIONS
Cited by 5 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Zerodur

Surface roughness

Atmospheric plasma

Plasma

Oxygen

Chemical reactions

Silicon

Back to Top