Wet-cleaning of contaminants on the surface of multilayer dielectric pulse compressor gratings by the Piranha solution

Shangbi Chen; Bin Sheng; Xiangdong Xu; Shaojun Fu

doi:10.1117/12.866204

6 October 2010 Wet-cleaning of contaminants on the surface of multilayer dielectric pulse compressor gratings by the Piranha solution

Shangbi Chen, Bin Sheng, Xiangdong Xu, Shaojun Fu

Author Affiliations +

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 765522 (2010) https://doi.org/10.1117/12.866204
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Contaminants are deemed to be the initial source of optical-damage mechanisms as well as the main reason to decrease the Laser Induced Damage Threshold (LIDT) of multilayer dielectric pulse compressor gratings (PCG). In this paper, the Piranha solution was used effectively and nondestructively to remove the residual contaminants on the surface of PCG. The surface cleanliness was evaluated by Scanning Electron Microscopy (SEM) and X-ray Photoelectron Spectroscopy (XPS). The higher removal efficiency was achieved with more times of multiple-cleaning by fresh Piranha solution which has an effectiveness for a given period of time.

Citation Download Citation

Shangbi Chen, Bin Sheng, Xiangdong Xu, and Shaojun Fu "Wet-cleaning of contaminants on the surface of multilayer dielectric pulse compressor gratings by the Piranha solution", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 765522 (6 October 2010); https://doi.org/10.1117/12.866204

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