Nanoprobe maskless lithography

Ivo W. Rangelow; Tzvetan Ivanov; Yanko Sarov; Andreas Schuh; Andreas Frank; Hans Hartmann; Jens-Peter Zöllner; Dierdre L. Olynick; V. Kalchenko

doi:10.1117/12.852265

2 April 2010 Nanoprobe maskless lithography

Ivo W. Rangelow, Tzvetan Ivanov, Yanko Sarov, Andreas Schuh, Andreas Frank, Hans Hartmann, Jens-Peter Zöllner, Dierdre L. Olynick, V. Kalchenko

Author Affiliations +

Proceedings Volume 7637, Alternative Lithographic Technologies II; 76370V (2010) https://doi.org/10.1117/12.852265
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Scanning probe-based methods for surface modification and lithography are an emerging method of producing sub 20-nm features for nanoelectronic applications. In this study, we have demonstrated the nanoscale lithography based on patterning of 10 to 50-nm-thick calix[4]arene by electric-field-induced electrostatic scanning probe lithography. The features size control is obtained using electrostatic interactions and depends on the applied bias and speed of the AFM tip. The width of the obtained lines and dots varies from 10 to 60 nm depending on tip-sharpness, tip-substrate separation and tip-bias voltage.

Citation Download Citation

Ivo W. Rangelow, Tzvetan Ivanov, Yanko Sarov, Andreas Schuh, Andreas Frank, Hans Hartmann, Jens-Peter Zöllner, Dierdre L. Olynick, and V. Kalchenko "Nanoprobe maskless lithography", Proc. SPIE 7637, Alternative Lithographic Technologies II, 76370V (2 April 2010); https://doi.org/10.1117/12.852265

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE