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28 December 2010 Precision positioning system based on intelligent Fuzzy-PID control
Zhen Liu, Liqiong Zhang, Yan Li
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Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75441J (2010) https://doi.org/10.1117/12.886016
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China
Abstract
To break through the limitations of static and dynamic characteristics of conventional step motor driven open-loop positioning devices, a two-dimensional precision positioning system with a travel range of 100mm×100mm has been developed. This paper presents its structure, control principle and performance experiments. This system, equipped with cross roller guides working as linear guiding elements, is driven by step motors through ball screw transmission. A threeaxis dual-frequency laser interferometric measurement system is established for real-time measurement and feedback of system's movements in three degrees of freedom (DOF) and an intelligent Fuzzy-PID controller is implemented for this system's motion control. In the controller, the PID module calculates the output from motor drivers and its initial parameters are tuned through expansion of critical proportioning method; the Fuzzy module optimizes PID parameters to fulfill specific requirements of different movement stages. A dead zone control mechanism is developed in this controller to minimize the oscillations around target position. Experimental results indicate that system with Fuzzy-PID controller shows faster response than that with ordinary PID controller. Moreover, with this controller implemented, the developed precision positioning system achieves better repeatability (±2μm) and accuracy (±2.5μm) within the full range than open-loop system using step motor.
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Zhen Liu, Liqiong Zhang, and Yan Li "Precision positioning system based on intelligent Fuzzy-PID control", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75441J (28 December 2010); https://doi.org/10.1117/12.886016
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KEYWORDS
Control systems
Fuzzy logic
Intelligence systems
Interferometry
Digital signal processing
Motion controllers
Interferometers
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