SEM probe defocusing method of measurement of linear sizes of nanorelief elements

M. N Filippov; Yu. A. Novikov; A. V. Rakov; P. A. Todua

doi:10.1117/12.854696

26 February 2010 SEM probe defocusing method of measurement of linear sizes of nanorelief elements

M. N Filippov, Yu. A. Novikov, A. V. Rakov, P. A. Todua

Proceedings Volume 7521, International Conference on Micro- and Nano-Electronics 2009; 752116 (2010) https://doi.org/10.1117/12.854696
Event: International Conference on Micro- and Nano-Electronics 2009, 2009, Zvenigorod, Russian Federation

Abstract

The new method of measurement of linear sizes of nanorelief elements is presented. The applicability of this method to linear measurements of nanorelief elements with trapezoid profile and wide and small inclination angles of side walls is demonstrated. The results of developed method and direct measurements are compared. Examples of measurements of linear sizes of relief pitch structures are given.

Citation Download Citation

M. N Filippov, Yu. A. Novikov, A. V. Rakov, and P. A. Todua "SEM probe defocusing method of measurement of linear sizes of nanorelief elements", Proc. SPIE 7521, International Conference on Micro- and Nano-Electronics 2009, 752116 (26 February 2010); https://doi.org/10.1117/12.854696

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