Effect of different support structures on the characteristic of the grating light modulators

Wei Wei; Weiming Chen; Yong Zhu; Ning Wang; Yi Qin; Jie Zhang

doi:10.1117/12.838239

20 November 2009 Effect of different support structures on the characteristic of the grating light modulators

Wei Wei, Weiming Chen, Yong Zhu, Ning Wang, Yi Qin, Jie Zhang

Proceedings Volume 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications; 75100I (2009) https://doi.org/10.1117/12.838239
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

The energy method is applied in the analysis of the elastic coefficients of the crab-leg beam and the guided-end beam under the micro-nano-scale, the theoretical formula of the elastic coefficient is got. By considering the elastic coefficient caused by the residual stress and the edge effect of the capacitors, the static electrical and mechanical model of the grating light modulators is established. According to the static electrical and mechanical model and the actual design parameters, the pull-in voltage of the GLM with crab-leg beam is 7.2 V and the pull-in voltage of the GLM with guided-end beam is 9.5 V. The experimental system is built to test the performance of the grating light modulator. By using this experimental system, the pull-in voltage of the GLM with crab-leg beam is 7.6 V and the pull-in voltage of the GLM with guided-end beam is 10.2V.

Citation Download Citation

Wei Wei, Weiming Chen, Yong Zhu, Ning Wang, Yi Qin, and Jie Zhang "Effect of different support structures on the characteristic of the grating light modulators", Proc. SPIE 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 75100I (20 November 2009); https://doi.org/10.1117/12.838239

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