MOEMS accelerometer based on microfiber knot resonator

Yu Wu; Xu Zeng; Yun-Jiang Rao; Chang-Lun Hou; Guo-Guang Yang

doi:10.1117/12.835344

5 October 2009 MOEMS accelerometer based on microfiber knot resonator

Yu Wu, Xu Zeng, Yun-Jiang Rao, Chang-Lun Hou, Guo-Guang Yang

Proceedings Volume 7503, 20th International Conference on Optical Fibre Sensors; 75036U (2009) https://doi.org/10.1117/12.835344
Event: 20th International Conference on Optical Fibre Sensors, 2009, Edinburgh, United Kingdom

Abstract

A MOEMS (Micro-Optical Electronic Mechanical System) accelerometer based on a microfiber knot resonator is proposed and demonstrated in this paper, and the microfiber knot resonator acts as the sensing device for vibration measurement of the MOEMS structure. The diameters of the microfiber and microfiber knot are 1.1um and 386um, respectively. The experimental results show that such an accelerometer has a sensitivity of 654.7 mV/g, and a dynamic range over ±25g. This sensitivity can be increased significantly by increasing the Q factor of the microfiber knot resonators, which can be achieved by improving fabrication of the microfiber.

Citation Download Citation

Yu Wu, Xu Zeng, Yun-Jiang Rao, Chang-Lun Hou, and Guo-Guang Yang "MOEMS accelerometer based on microfiber knot resonator", Proc. SPIE 7503, 20th International Conference on Optical Fibre Sensors, 75036U (5 October 2009); https://doi.org/10.1117/12.835344

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