Power spectral density specification and analysis of large optical surfaces

Erkin Sidick

doi:10.1117/12.823844

17 June 2009 Power spectral density specification and analysis of large optical surfaces

Erkin Sidick

Author Affiliations +

Proceedings Volume 7390, Modeling Aspects in Optical Metrology II; 73900L (2009) https://doi.org/10.1117/12.823844
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

The 2-dimensional Power Spectral Density (PSD) can be used to characterize the mid- and the high-spatial frequency components of the surface height errors of an optical surface. We found it necessary to have a complete, easy-to-use approach for specifying and evaluating the PSD characteristics of large optical surfaces, an approach that allows one to specify the surface quality of a large optical surface based on simulated results using a PSD function and to evaluate the measured surface profile data of the same optic in comparison with those predicted by the simulations during the specification-derivation process. This paper provides a complete mathematical description of PSD error, and proposes a new approach in which a 2-dimensional (2D) PSD is converted into a 1-dimensional (1D) one by azimuthally averaging the 2D-PSD. The 1D-PSD calculated this way has the same unit and the same profile as the original PSD function, thus allows one to compare the two with each other directly.

Citation Download Citation

Erkin Sidick "Power spectral density specification and analysis of large optical surfaces", Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900L (17 June 2009); https://doi.org/10.1117/12.823844

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