Compensated laser encoder with symmetric and quasi-common-path heterodyne interferometry

Cheng-Chih Hsu; Ju-Yi Lee; Chyan-Chyi Wu

doi:10.1117/12.827453

17 June 2009 Compensated laser encoder with symmetric and quasi-common-path heterodyne interferometry

Cheng-Chih Hsu, Ju-Yi Lee, Chyan-Chyi Wu

Author Affiliations +

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73891M (2009) https://doi.org/10.1117/12.827453
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

A novel laser encoder is presented for sub-nanometer displacement measurement. It is based on optical heterodyne interferometry and two arms of compensation optics with a symmetric and quasi-common-path optical configuration in polarization space. High stability and resolution can be achieved for displacement measurements. The theoretical analysis shows that our method can effectively compensate misalignments resulting from the dynamic runout in laser encoders. Experimental results reveal that the laser encoder can measure a displacement in subnanometer scale and in millimeter travel range.

Citation Download Citation

Cheng-Chih Hsu, Ju-Yi Lee, and Chyan-Chyi Wu "Compensated laser encoder with symmetric and quasi-common-path heterodyne interferometry", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73891M (17 June 2009); https://doi.org/10.1117/12.827453

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