Hartmann wavefront scanner for determining surface features

Andrey A. Goloborodko; Vitalij N. Kurashov; Dmytro V. Podanchuk; Natalia S. Sutyagina; Mykhailo M. Kotov

doi:10.1117/12.850680

31 December 2009 Hartmann wavefront scanner for determining surface features

Andrey A. Goloborodko, Vitalij N. Kurashov, Dmytro V. Podanchuk, Natalia S. Sutyagina, Mykhailo M. Kotov

Proceedings Volume 7388, Ninth International Conference on Correlation Optics; 73880P (2009) https://doi.org/10.1117/12.850680
Event: Correlation Optics 2009, 2009, Chernivsti, Ukraine

Abstract

The modification of the Hartmann wave-front scanner for analyzing the laser beam wave-front reflected from the samples' surface is considered. It is proposed to use the polarization wave-front scanner that provides by order of magnitude greater sensitivity and measurement range than the Shack-Hartmann sensor and allows separating the phase shifts, connected with relief inhomogeneities and local changes of the surface refractive index. The results of detecting test surfaces with different structure by the wave-front scanner are presented.

Citation Download Citation

Andrey A. Goloborodko, Vitalij N. Kurashov, Dmytro V. Podanchuk, Natalia S. Sutyagina, and Mykhailo M. Kotov "Hartmann wavefront scanner for determining surface features", Proc. SPIE 7388, Ninth International Conference on Correlation Optics, 73880P (31 December 2009); https://doi.org/10.1117/12.850680

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