Optimization of 3-D topography measurement based on Moiré technique

Liang Nie; Jun Han; Xun Yu; Baoyuan Liu

doi:10.1117/12.828807

20 May 2009 Optimization of 3-D topography measurement based on Moiré technique

Liang Nie, Jun Han, Xun Yu, Baoyuan Liu

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 728347 (2009) https://doi.org/10.1117/12.828807
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

To provide a non-contact, simple, high speed and high accuracy measuring technique for industry measurement, the advanced Moiré fringe method is developed in this paper. Based on virtual grating, fringe doubling, spatial filtering and phase shifting technique, a three-dimensional topography is measured. The virtual grating, spatial filtering and phase shifting technique are used to eliminate the phase shifting errors. Four step phase shifting virtual gratings, generated by computer, are superposited with testing grating and Moiré fringe patterns are formed. Four phase-shifting patterns can be gained by filtering four Moiré fringe patterns. An experiment equipment is designed and built. With the fo spatial filtering, phase shifting technique and phase unwrapped of virtual grating, the three-dimensional topography is measured, and the measuring accuracy is also evaluated. The obtained result shows that the improvement of the phase-shifting topography measurement methods is suitable for testing industrial product topography featuring non-contact, simplicity, high speed and high-precision.

Citation Download Citation

Liang Nie, Jun Han, Xun Yu, and Baoyuan Liu "Optimization of 3-D topography measurement based on Moiré technique", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 728347 (20 May 2009); https://doi.org/10.1117/12.828807

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KEYWORDS

Phase shifts

Diffraction gratings

3D image processing

Phase shifting

Distortion

Spatial filters

Image filtering

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