Research on vibration cancellation interferometric measurements of surface profile with nanometer accuracy

Helun Jiang; Guotian He

doi:10.1117/12.828676

20 May 2009 Research on vibration cancellation interferometric measurements of surface profile with nanometer accuracy

Helun Jiang, Guotian He

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72831O (2009) https://doi.org/10.1117/12.828676
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Surface profile of the micro-nanometer-mechanical structure characterized one of the most important. This paper proposes an anti-vibration interference measurement method, develops an anti-vibration sinusoidal-phase modulation (SPM) interferometer for surface profile measurement, and elaborates on its principle. It also analyzes the subsystems of the anti-vibration feedback control principles: the feedback control subsystem signal from interference to retrieve a point of interfering signals as feedback signals into laser diode (LD) to change the wavelength, which will reduce influence on the ambient temperature changes, vibration and so on. Measuring impact can be reduced to the minimum to improve the measurement stability and accuracy. Repeatability in the measurements was about 2.3 nm. Experimental results show that the measurement method is feasible.

Citation Download Citation

Helun Jiang and Guotian He "Research on vibration cancellation interferometric measurements of surface profile with nanometer accuracy", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831O (20 May 2009); https://doi.org/10.1117/12.828676

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KEYWORDS

Interferometers

Phase modulation

Scanning probe microscopy

Semiconductor lasers

Feedback signals

Phase shift keying

Temperature metrology

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