Optimal character-size exploration for increasing throughput of MCC lithographic systems

Makoto Sugihara

doi:10.1117/12.813884

17 March 2009 Optimal character-size exploration for increasing throughput of MCC lithographic systems

Makoto Sugihara

Proceedings Volume 7271, Alternative Lithographic Technologies; 72710L (2009) https://doi.org/10.1117/12.813884
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

We propose a character size optimization technique to enhance throughput of multi-column-cell (MCC) lithographic systems in which transistor patterns are projected with multiple column cells in parallel. Each and every column cell is capable of projecting patterns with character projection (CP) and variable shaped beam (VSB) methods. Seeking the optimal character size of characters contributes to minimizing the number of EB shots and reducing the fabrication cost for ICs. Experimental results show that the character size optimization technique reduced 70.6% of EB shots in the best case with an available electron beam size.

Citation Download Citation

Makoto Sugihara "Optimal character-size exploration for increasing throughput of MCC lithographic systems", Proc. SPIE 7271, Alternative Lithographic Technologies, 72710L (17 March 2009); https://doi.org/10.1117/12.813884

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