Preconcentrator-based sensor µ-system for low-level benzene detection

P. Ivanov; I. Gràcia; F. Blanco; J.-P. Raskin; R. Cumeras; N. Sabaté; X. Vilanova; X. Correig; L. Fonseca; E. Figueras; J. Santander; C. Cané

doi:10.1117/12.807433

30 December 2008 Preconcentrator-based sensor µ-system for low-level benzene detection

P. Ivanov, I. Gràcia, F. Blanco, J.-P. Raskin, R. Cumeras, N. Sabaté, X. Vilanova, X. Correig, L. Fonseca, E. Figueras, J. Santander, C. Cané

Author Affiliations +

Proceedings Volume 7268, Smart Structures, Devices, and Systems IV; 72680S (2008) https://doi.org/10.1117/12.807433
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2008, Melbourne, Australia

Abstract

In this paper, a preconcentrator-based sensor &mgr;-system for low level benzene detection is presented. It consists of a spiral-shaped &mgr;-reconcentrator with dimensions of 10cm × 300&mgr;m × 300&mgr;m, followed by a &mgr;-hotplate sensor matrix. The &mgr;-preconcentrator was fabricated on a silicon wafer by means of DRIE and anodic bonding techniques. To obtain the concentration factor of the fabricated devices, a GC/MS: Shimadzu-QP5000 equipment was used. The results obtained showed excellent repeatability and preconcentration factors up to 286. A considerable improvement (1500%) in the sensor responses was achieved with Pd doped SnO2 sensors. The small size of the manufactured devices enables their incorporation in an integrated GC/MS gas sensor system.

Citation Download Citation

P. Ivanov, I. Gràcia, F. Blanco, J.-P. Raskin, R. Cumeras, N. Sabaté, X. Vilanova, X. Correig, L. Fonseca, E. Figueras, J. Santander, and C. Cané "Preconcentrator-based sensor µ-system for low-level benzene detection", Proc. SPIE 7268, Smart Structures, Devices, and Systems IV, 72680S (30 December 2008); https://doi.org/10.1117/12.807433

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available