A diffraction grating scale for long range and nanometer resolution

Kuang-Chao Fan; Bai-Kun Li; Chi-Hui Liu

doi:10.1117/12.815188

12 January 2009 A diffraction grating scale for long range and nanometer resolution

Kuang-Chao Fan, Bai-Kun Li, Chi-Hui Liu

Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 71334J (2009) https://doi.org/10.1117/12.815188
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China

Abstract

This paper presents a novel design of a laser linear encoder based on the principle of diffractive interferometry. It adopts a special design in optical path that can increase the alignment tolerance between the optical head and the grating. Because of the simple optical configuration and the merit of compact size, it can effectively reduce the environmental disturbance and allow higher stability. In addition, the signal process circuit can effectively decrease three major errors: the DC shift difference, the electronic gain difference and the phase orthogonal error of two sinusoid al output signals. The resolution can reach to 1nm. Experiment results showed the standard deviation was below 17nm for 15mm travel in normal laboratory environment.

Citation Download Citation

Kuang-Chao Fan, Bai-Kun Li, and Chi-Hui Liu "A diffraction grating scale for long range and nanometer resolution", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71334J (12 January 2009); https://doi.org/10.1117/12.815188

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