Basic research on micro-nano-instruments by femtosecond laser ablation on metal surface

Xiaochang Ni; Ru Hong; Qi Sun; Ching-Yue Wang; Lu Chai; Wei Jia

doi:10.1117/12.805569

12 January 2009 Basic research on micro-nano-instruments by femtosecond laser ablation on metal surface

Xiaochang Ni, Ru Hong, Qi Sun, Ching-Yue Wang, Lu Chai, Wei Jia

Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 71334C (2009) https://doi.org/10.1117/12.805569
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China

Abstract

Nano-particles and nano-period ripples can be used to form some micro-nano-instruments in microelectronics. In this paper a femtosecond (fs) pulse laser (148fs, 1KHz, center wavelength=775nm) is used to irradiate on metal surface, then nano-particles and nano-period ripples can be obtained in the focal scale, the size of which is shorter than the center wavelength. For describing the formation time and characteristic of nano-particles and nano-period ripples, we have increased the laser fluence from the threshold of material to a higher value and increased the laser exposure time in fixed laser fluence on different materials. Experimental results show that nano-particles occur earlier than nano-period ripples. And as the fs laser pulse number being increased, the periodical nano-ripples is clearer and clearer and the depth of ripples is deeper and deeper. Finally, permanent ablation will occur in the focal scale basing on the nano-ripples. After surface plasmon polaritons theory is used, the period of nano-ripples can be explained exactly. This work is the basic research for micro-nano-instruments by fs laser ablation technique on metal surface.

Citation Download Citation

Xiaochang Ni, Ru Hong, Qi Sun, Ching-Yue Wang, Lu Chai, and Wei Jia "Basic research on micro-nano-instruments by femtosecond laser ablation on metal surface", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71334C (12 January 2009); https://doi.org/10.1117/12.805569

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