Behaviors of fracture toughness of thin transparent glass for liquid crystal display by EB irradiation

Keisuke Iwata; Akira Tonegawa; Yoshitake Nishi

doi:10.1117/12.794784

9 September 2008 Behaviors of fracture toughness of thin transparent glass for liquid crystal display by EB irradiation

Keisuke Iwata, Akira Tonegawa, Yoshitake Nishi

Author Affiliations +

Proceedings Volume 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V; 70390Q (2008) https://doi.org/10.1117/12.794784
Event: NanoScience + Engineering, 2008, San Diego, California, United States

Abstract

An influence of electron beam (EB) irradiation on the crack generation and propagation of transparent glasses are studied by using a standard indentation fracture method. The thin (less than 0.5mm) transparent glass is used for substrate of more than 100 inches crystal liquid display. However, it is difficult to product ultra thin and large-size substrate without fracture. Therefore, these glasses have been expected to enhance the fracture toughness of substrate for the displays. As results, EB irradiation, which is one of short-time treatments of dry process at low temperature, increases the crack nucleation energy of these glasses, although the EB irradiation does not change the crack propagation energy of these glasses. The EB irradiation generates dangling bonds in these glasses. Partial relaxation of the residual strain occurs around these dangling bonds in the silica network structure. If the inter-atomic distance of the stronger metal-oxygen pairs becomes optimum on the potential curve of these glasses, the relaxation increases the bonding energy of the network structure. Evidently, the enhancement of crack nucleation energy is mainly due to an increase in the bonding energy for the stronger metal-oxygen atomic pairs in the atomic network structure, as well as the relaxation of the network structure.

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Keisuke Iwata, Akira Tonegawa, and Yoshitake Nishi "Behaviors of fracture toughness of thin transparent glass for liquid crystal display by EB irradiation", Proc. SPIE 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V, 70390Q (9 September 2008); https://doi.org/10.1117/12.794784

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