High energy microelectromechanical oscillator based on the electrostatic microactuator

I. Baginsky; Edvard Kostsov; Victor Sobolev

doi:10.1117/12.802490

29 April 2008 High energy microelectromechanical oscillator based on the electrostatic microactuator

I. Baginsky, Edvard Kostsov, Victor Sobolev

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 70251E (2008) https://doi.org/10.1117/12.802490
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

Electrostatic high energy micromotor based on the ferroelectric films is studied as applied to microelectromechanical devices operating in vibrational mode. It is shown that the micromotor can be efficiently used in high frequency micromechanical vibrators that are used in high energy MEMS devices, such as micropumps, microvalves, microinjectors, adaptive microoptic devices etc.

Citation Download Citation

I. Baginsky, Edvard Kostsov, and Victor Sobolev "High energy microelectromechanical oscillator based on the electrostatic microactuator", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70251E (29 April 2008); https://doi.org/10.1117/12.802490

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