Monolithic germanium SWIR imaging array

Conor S. Rafferty; Clifford A. King; Bryan D. Ackland; Ingvar Aberg; T. S. Sriram; Jay H. O'Neill

doi:10.1117/12.782133

15 April 2008 Monolithic germanium SWIR imaging array

Conor S. Rafferty, Clifford A. King, Bryan D. Ackland, Ingvar Aberg, T. S. Sriram, Jay H. O'Neill

Proceedings Volume 6940, Infrared Technology and Applications XXXIV; 69400N (2008) https://doi.org/10.1117/12.782133
Event: SPIE Defense and Security Symposium, 2008, Orlando, Florida, United States

Abstract

NoblePeak Vision has developed monolithic visible to short-wave infrared (SWIR) imaging arrays. An innovative growth technique is used to integrate germanium islands with the silicon transistors and metal layers of a CMOS process. Imaging arrays of 128x128 pixels at a 10 μm pitch were designed and fabricated, with the silicon photodiodes of a conventional CMOS imager replaced by germanium photodiodes. Broadband response from 400 nm to 1650 nm has been measured. Imaging die have been packaged with a Peltier cooler and built into a camera evaluation kit.

Citation Download Citation

Conor S. Rafferty, Clifford A. King, Bryan D. Ackland, Ingvar Aberg, T. S. Sriram, and Jay H. O'Neill "Monolithic germanium SWIR imaging array", Proc. SPIE 6940, Infrared Technology and Applications XXXIV, 69400N (15 April 2008); https://doi.org/10.1117/12.782133

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