Nano patterning with a single high-transmission nano-metal aperture system

Yongwoo Kim; Sinjeung Park; Eungman Lee; Jae W. Hahn

doi:10.1117/12.774485

21 March 2008 Nano patterning with a single high-transmission nano-metal aperture system

Yongwoo Kim, Sinjeung Park, Eungman Lee, Jae W. Hahn

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 69212C (2008) https://doi.org/10.1117/12.774485
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

We design a C-shaped aperture which overcomes the diffraction limit of light to produce a high-brightness nano-size light spot. For optical nano lithography, we construct a nano patterning system using an optical probe which adopts a solid immersion lens (SIL), the 120 nm thickness aluminum film on the bottom surface of the SIL and the C-shaped aperture engraved in the metal film. Light source is a diode laser of 405nm wavelength to expose h-line photoresist(PR). A linear stage holding the optical probe makes the nano aperture contact with the PR coated on silicon wafer. Using this patterning system, we obtain sub 100nm array patterns and measure the system performance in various exposure conditions to verify the feasibility of plasmonic lithography.

Citation Download Citation

Yongwoo Kim, Sinjeung Park, Eungman Lee, and Jae W. Hahn "Nano patterning with a single high-transmission nano-metal aperture system", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69212C (21 March 2008); https://doi.org/10.1117/12.774485

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