Thermopower measurement of freestanding nanowires using a MEMS workbench

Nicolas B. Duarte; Srinivas A. Tadigadapa

doi:10.1117/12.775801

20 February 2008 Thermopower measurement of freestanding nanowires using a MEMS workbench

Nicolas B. Duarte, Srinivas A. Tadigadapa

Proceedings Volume 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface; 68850G (2008) https://doi.org/10.1117/12.775801
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

Nanowires of a diameter less than 50nm have been predicted to exhibit a higher thermoelectric figure of merit in comparison to their bulk equivalent. In order to experimentally measure the thermoelectric power in nanowires it is necessary to design and fabricate a measurement platform that is ideally matched in thermal and physical size and capable of testing a large number of individual nanowires in a high throughput manner. In this paper we present the design, fabrication, and characterization of a MEMS thermoelectric workbench with a high density of testing locations. Characteristic measurements of the thermoelectric power of Au nanowires are presented as demonstration of the workbench functionality.

Citation Download Citation

Nicolas B. Duarte and Srinivas A. Tadigadapa "Thermopower measurement of freestanding nanowires using a MEMS workbench", Proc. SPIE 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 68850G (20 February 2008); https://doi.org/10.1117/12.775801

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