Paper
14 February 2008 Nanoscale growth control of functional thin films on atomically surface-controlled substrates by laser MBE
Wakana Hara, Mamoru Yoshimoto
Author Affiliations +
Abstract
The nanoscale growth control of functional ceramic thin films was examined by our originally developed technique, which was based on the nanoscale substrate engineering as well as atomic layer control via laser molecular beam epitaxy (laser-MBE). The atomically controlled surface of the substrate such as the ultrasmooth sapphire (single-crystal Al2O3) substrate with atomic steps and atomically smooth terraces was found to enhance atomically layer-by-layer growth as well as self-assembled nucleation along the atomic steps. The novel epitaxial growths could be attained on the physically or chemically controlled substrates, that is, (1) termination-regulated molecular layer-by-layer epitaxy, (2) step-decoration epitaxy resulting in the nanowire or nanodots, (3) room-temperature epitaxial growth of AlN, and (4) self-organized formation of the nanogroove-striped pattern on the film surface.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wakana Hara and Mamoru Yoshimoto "Nanoscale growth control of functional thin films on atomically surface-controlled substrates by laser MBE", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790V (14 February 2008); https://doi.org/10.1117/12.773283
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Thin films

Sapphire

Aluminum nitride

Oxides

Ferroelectric materials

Epitaxy

Nanowires

Back to Top