Ambient Temperature Deposition Of MgF2 With Noble And Fluorocarbon Ion Assistance

U J Gibson; C M Kennemore III

doi:10.1117/12.939547

23 December 1986 Ambient Temperature Deposition Of MgF2 With Noble And Fluorocarbon Ion Assistance

U J Gibson, C M Kennemore III

Proceedings Volume 0678, Optical Thin Films II: New Developments; (1986) https://doi.org/10.1117/12.939547
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

We have investigated the properties of magnesium fluoride films made using ion assisted deposition, with argon or Freon as the source gas. The effect of the ion species and residual gases on the chemical, physical, and optical properties have been determined. For all films, the optical performance is strongly depen-dent on the presence of residual oxygen-bearing gases. For the Freon bombarded films the incorporation of carbon is not seen to degrade their transparency, and a more stoichiometric Mg:F ratio is acheived.

Citation Download Citation

U J Gibson and C M Kennemore III "Ambient Temperature Deposition Of MgF2 With Noble And Fluorocarbon Ion Assistance", Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); https://doi.org/10.1117/12.939547

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