High numerical-aperture microlens fabricated by focused ion beam milling

Yi Chiu; Chien-Hsun Huang; Ying-Chien Hsu

doi:10.1117/12.738639

16 July 2007 High numerical-aperture microlens fabricated by focused ion beam milling

Yi Chiu, Chien-Hsun Huang, Ying-Chien Hsu

Proceedings Volume 6620, Optical Data Storage 2007; 66200L (2007) https://doi.org/10.1117/12.738639
Event: Optical Data Storage 2007, 2007, Portland, OR, United States

Abstract

The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 μm.

Citation Download Citation

Yi Chiu, Chien-Hsun Huang, and Ying-Chien Hsu "High numerical-aperture microlens fabricated by focused ion beam milling", Proc. SPIE 6620, Optical Data Storage 2007, 66200L (16 July 2007); https://doi.org/10.1117/12.738639

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