Robust Shack-Hartmann wavefront sensing with ultraflat microaxicons

R. Grunwald; M. Bock; S. Huferath

doi:10.1117/12.726081

18 June 2007 Robust Shack-Hartmann wavefront sensing with ultraflat microaxicons

R. Grunwald, M. Bock, S. Huferath

Proceedings Volume 6617, Modeling Aspects in Optical Metrology; 66170O (2007) https://doi.org/10.1117/12.726081
Event: Optical Metrology, 2007, Munich, Germany

Abstract

Recently developed Shack-Hartmann sensors with axicon beam shapers show an enhanced robustness compared to setups with spherical microlenses. With ultraflat axicon arrays, further improvements were obtained. Very extended, fringeless nondiffracting beams or "needle beams" with self-reconstructing properties can be produced. Specific advantages of thin-film structures like low dispersion and reflective operation can be implemented. Here we report on first systematic studies of angular tolerance and displacement sensitivity of different types of refractive, reflective and diffractive Shack-Hartmann devices. A quantitative description of the functionality is given on the basis of higher order spatial statistical moments. This method enables for identifying optimum parameter ranges to determine wavefront curvatures under extreme conditions.

Citation Download Citation

R. Grunwald, M. Bock, and S. Huferath "Robust Shack-Hartmann wavefront sensing with ultraflat microaxicons", Proc. SPIE 6617, Modeling Aspects in Optical Metrology, 66170O (18 June 2007); https://doi.org/10.1117/12.726081

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available