Paper
7 March 2007 Silicon-based low-loss photonic crystal waveguides
Daniel Pergande, Alexey Milenin, Torsten Geppert, Andreas von Rhein, Ralf B. Wehrspohn
Author Affiliations +
Abstract
We present a new high-index-contrast material system to realize ridge waveguides and PhC waveguides made of a thin silicon slab embedded in two silica layers. Hence fully symmetrical structures can be etched and two important conditions for low-loss guiding of light can be matched: The symmetry properties of the material avoid polarization mixing and the high index contrast leads to strong confinement of light. Because of operating completely below the lightcone the PhC waveguides allow theoretically lossless guiding of light.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel Pergande, Alexey Milenin, Torsten Geppert, Andreas von Rhein, and Ralf B. Wehrspohn "Silicon-based low-loss photonic crystal waveguides", Proc. SPIE 6475, Integrated Optics: Devices, Materials, and Technologies XI, 647511 (7 March 2007); https://doi.org/10.1117/12.699892
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KEYWORDS
Waveguides

Silicon

Etching

Silica

Chromium

Photomasks

Reflectivity

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