Transmittance and reflective coatings for the 50-200-nm spectral range

Mónica Fernández-Perea; Juan I. Larruquert; José A. Aznárez; José A. Méndez

doi:10.1117/12.680987

29 August 2006 Transmittance and reflective coatings for the 50-200-nm spectral range

Mónica Fernández-Perea, Juan I. Larruquert, José A. Aznárez, José A. Méndez

Proceedings Volume 6317, Advances in X-Ray/EUV Optics, Components, and Applications; 63170L (2006) https://doi.org/10.1117/12.680987
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

This proceeding reviews the performance of a far-extreme ultraviolet (FUV-EUV) reflectometer-deposition system available at GOLD-Instituto de Fisica Aplicada, CSIC and the different sorts of coatings for the EUV that can be prepared with this equipment. Coatings both for wavelengths longer and shorter than the LiF/MgF₂ cutoff wavelengths are prepared. Regarding coatings above these cutoffs, they are based in the combination of Al and MgF₂. High reflectance coatings of Al protected with MgF₂ can be prepared with a reflectance of ~80% at the H Lyman α line at 121.6 nm. Narrowband transmittance filters based on (Al/MgF₂)_n are also deposited, with a high peak transmittance down to wavelengths as short as 121.6 nm. Regarding coatings for wavelengths shorter than the fluoride cutoffs, wideband reflective coatings based on a single layer of SiC and also on Al/MgF₂/SiC multilayers are prepared with a high reflectance at wavelengths longer than ~80 nm. In addition to the above coatings, a plan for the deposition in the near future of narrowband reflective coatings tuned at wavelengths as long as 95 nm (but shorter than the LiF cutoff) is discussed.

Citation Download Citation

Mónica Fernández-Perea, Juan I. Larruquert, José A. Aznárez, and José A. Méndez "Transmittance and reflective coatings for the 50-200-nm spectral range", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 63170L (29 August 2006); https://doi.org/10.1117/12.680987

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