Analysis of systematic errors in spatial carrier phase shifting applied to interferogram intensity modulation determination

Adam Styk; Krzysztof Patorski

doi:10.1117/12.679058

14 August 2006 Analysis of systematic errors in spatial carrier phase shifting applied to interferogram intensity modulation determination

Adam Styk, Krzysztof Patorski

Author Affiliations +

Proceedings Volume 6292, Interferometry XIII: Techniques and Analysis; 62920A (2006) https://doi.org/10.1117/12.679058
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

This work is devoted to two-beam interferogram intensity modulation decoding using spatial carrier phase shifting interferometry. Single frame recording, simplicity of experimental equipment and uncomplicated data processing are the main advantages of the method. A comprehensive analysis of the influence of systematic errors (spatial carrier miscalibration, non-uniform average intensity profile, nonlinear recording) on the modulation distribution determination using automatic fringe pattern analysis techniques is presented. The results of searching for optimum calculation algorithm are described. Extensive numerical simulations are compared with laboratory findings obtained when testing vibrating silicon microelements under various experimental conditions.

Citation Download Citation

Adam Styk and Krzysztof Patorski "Analysis of systematic errors in spatial carrier phase shifting applied to interferogram intensity modulation determination", Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 62920A (14 August 2006); https://doi.org/10.1117/12.679058

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