Fabrication of a microfluidic device for simultaneous patterning of multiple chemical species by dip pen nanolithography (DPN)

J. Alberto Rivas-Cordona; Debjyoti Banerjee

doi:10.1117/12.665328

18 May 2006 Fabrication of a microfluidic device for simultaneous patterning of multiple chemical species by dip pen nanolithography (DPN)

J. Alberto Rivas-Cordona, Debjyoti Banerjee

Author Affiliations +

Proceedings Volume 6223, Micro (MEMS) and Nanotechnologies for Space Applications; 62230K (2006) https://doi.org/10.1117/12.665328
Event: Defense and Security Symposium, 2006, Orlando (Kissimmee), Florida, United States

Abstract

This paper describes the fabrication and testing of a microfluidic ink delivery device for Dip Pen Nanolithography (DPN^TM). The purpose of this microfluidic device is to maximize the number of chemical species (inks) for nanofabrication that can be simultaneously patterned by DPN. The device (called 'Centiwells') consists of a two-dimensional array of 96micro-wells micro-machined on a silicon substrate and a thermoelectric module attached to the bottom of the substrate. Microbeads of a hygroscopic material (Poly-Ethylene Glycol) are dispensed into the microwells. By reducing the temperature of the substrate to below the dew point water droplets are condensed on the PEG microbeads, dissolving the beads and creating PEG solutions. Following the formation of the PEG solutions, an AFM tip (pen) is lowered into the micro-wells for loading ink ('dipping' or 'inking' step) and subsequently nanolithography is performed.

Citation Download Citation

J. Alberto Rivas-Cordona and Debjyoti Banerjee "Fabrication of a microfluidic device for simultaneous patterning of multiple chemical species by dip pen nanolithography (DPN)", Proc. SPIE 6223, Micro (MEMS) and Nanotechnologies for Space Applications, 62230K (18 May 2006); https://doi.org/10.1117/12.665328

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KEYWORDS

Scanning probe lithography

Microfluidics

Nanolithography

Optical lithography

Silicon

Chemical species

Semiconducting wafers

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