Development of 3D out-of-plane SU-8 microlenses using modified micromolding in capillaries (MIMIC) technology

A. Llobera; R. Wilke; D. W. Johnson; S. Büttgenbach

doi:10.1117/12.661642

21 April 2006 Development of 3D out-of-plane SU-8 microlenses using modified micromolding in capillaries (MIMIC) technology

A. Llobera, R. Wilke, D. W. Johnson, S. Büttgenbach

Author Affiliations +

Proceedings Volume 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration; 618512 (2006) https://doi.org/10.1117/12.661642
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

This paper describes a modification of the standard MIMIC technology, solving its main drawbacks, to define arrays of spherical or ellipsoidal microlenses. Perfectly symmetrical meniscuses have been obtained by using a XP SU-8 NO-2 layer beneath the PDMS mold. Moreover, the photostructurable properties of this polymer allow obtaining self-alignment structures for adequate fiber optics positioning. Microchannels ended with these meniscuses have been filled with standard SU-8 to obtain 3D microlenses. Agreement between theory and experimental results allows confirming the validity of the proposed technology.

Citation Download Citation

A. Llobera, R. Wilke, D. W. Johnson, and S. Büttgenbach "Development of 3D out-of-plane SU-8 microlenses using modified micromolding in capillaries (MIMIC) technology", Proc. SPIE 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration, 618512 (21 April 2006); https://doi.org/10.1117/12.661642

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