Optimal segmentation of polygon edges

Apo Sezginer; Bayram Yenikaya; Hsu-Ting Huang; Vishnu Kamat; Yung-Tin Chen

doi:10.1117/12.656695

14 March 2006 Optimal segmentation of polygon edges

Apo Sezginer, Bayram Yenikaya, Hsu-Ting Huang, Vishnu Kamat, Yung-Tin Chen

Proceedings Volume 6156, Design and Process Integration for Microelectronic Manufacturing IV; 61561G (2006) https://doi.org/10.1117/12.656695
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

In optical proximity correction, edges of polygons are segmented, and segments are independently moved to meet line-width or edge placement goals. The purpose of segmenting edges is to increase the degrees of freedom in proximity correction. Segmentation is usually performed according to predetermined, geometrical rules. Heuristic, model-based segmentation algorithms have been presented in the literature. We show that there is an optimal and unique way of segmenting polygon edges.

Citation Download Citation

Apo Sezginer, Bayram Yenikaya, Hsu-Ting Huang, Vishnu Kamat, and Yung-Tin Chen "Optimal segmentation of polygon edges", Proc. SPIE 6156, Design and Process Integration for Microelectronic Manufacturing IV, 61561G (14 March 2006); https://doi.org/10.1117/12.656695

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