Trap mechanism of micro bubble in micro concave patterns

Akira Kawai; Tomotaka Ariga; Simpei Hori; Masahiko Harumoto; Osamu Tamada; Masakazu Sanada

doi:10.1117/12.655447

29 March 2006 Trap mechanism of micro bubble in micro concave patterns

Akira Kawai, Tomotaka Ariga, Simpei Hori, Masahiko Harumoto, Osamu Tamada, Masakazu Sanada

Proceedings Volume 6153, Advances in Resist Technology and Processing XXIII; 61531T (2006) https://doi.org/10.1117/12.655447
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

The micro bubbles condense in the concave channel and are trapped at the channel corner. In the experiments, the deionized (DI) water is dropped on a dry film resist (DFR) pattern. In the result, the micro bubble condensed and trapped at the different position in various shape patterns. The removal of micro bubbles adhered on a resist pattern has been recognized as one important factor in micro device manufacturing. We explained the condensation behavior of the micro bubble based on thermodynamics. The force acting on the bubble is estimated based on the force balance model between buoyancy and line tension. We can control and predict the micro bubble condensation by designing micro pattern arrangement.

Citation Download Citation

Akira Kawai, Tomotaka Ariga, Simpei Hori, Masahiko Harumoto, Osamu Tamada, and Masakazu Sanada "Trap mechanism of micro bubble in micro concave patterns", Proc. SPIE 6153, Advances in Resist Technology and Processing XXIII, 61531T (29 March 2006); https://doi.org/10.1117/12.655447

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