Study on optical confocal probe based on time difference measurement with no reference path

Yuming Fan; Shuzhong Zhao; Junfeng Ren; Guoxiong Zhang

doi:10.1117/12.678104

19 May 2006 Study on optical confocal probe based on time difference measurement with no reference path

Yuming Fan, Shuzhong Zhao, Junfeng Ren, Guoxiong Zhang

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61501Q (2006) https://doi.org/10.1117/12.678104
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

On the basis of the measuring principle of dynamic active optical confocal probe based on time difference measurement that has a reference path, a dynamic active optical confocal probe based on time difference measurement without reference path is developed. In this paper, the working principle of this optical confocal probe is dissertated. A large-scale integrated measuring system is designed to simplify the structure of the probe and to enhance the stability of the probe. At the end of the paper, experiments about the performance test of the optical confocal probe based on time difference measurement with no reference path is carried out. Experiment results show that the probe has a measuring resolution of 0.1μm, a measuring range of 0.2mm and a linearity of 0.4μm.

Citation Download Citation

Yuming Fan, Shuzhong Zhao, Junfeng Ren, and Guoxiong Zhang "Study on optical confocal probe based on time difference measurement with no reference path", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61501Q (19 May 2006); https://doi.org/10.1117/12.678104

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